JPH0573351B2 - - Google Patents

Info

Publication number
JPH0573351B2
JPH0573351B2 JP10028788A JP10028788A JPH0573351B2 JP H0573351 B2 JPH0573351 B2 JP H0573351B2 JP 10028788 A JP10028788 A JP 10028788A JP 10028788 A JP10028788 A JP 10028788A JP H0573351 B2 JPH0573351 B2 JP H0573351B2
Authority
JP
Japan
Prior art keywords
barrier
region
shot
layer
thin layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP10028788A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01272154A (ja
Inventor
Koji Ootsuka
Norisumi Oomuro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanken Electric Co Ltd
Original Assignee
Sanken Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanken Electric Co Ltd filed Critical Sanken Electric Co Ltd
Priority to JP10028788A priority Critical patent/JPH01272154A/ja
Publication of JPH01272154A publication Critical patent/JPH01272154A/ja
Publication of JPH0573351B2 publication Critical patent/JPH0573351B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP10028788A 1988-04-25 1988-04-25 ショットキバリア半導体装置 Granted JPH01272154A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10028788A JPH01272154A (ja) 1988-04-25 1988-04-25 ショットキバリア半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10028788A JPH01272154A (ja) 1988-04-25 1988-04-25 ショットキバリア半導体装置

Publications (2)

Publication Number Publication Date
JPH01272154A JPH01272154A (ja) 1989-10-31
JPH0573351B2 true JPH0573351B2 (en]) 1993-10-14

Family

ID=14269972

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10028788A Granted JPH01272154A (ja) 1988-04-25 1988-04-25 ショットキバリア半導体装置

Country Status (1)

Country Link
JP (1) JPH01272154A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6292969B2 (ja) * 2014-05-09 2018-03-14 三菱電機株式会社 炭化珪素半導体装置およびその製造方法

Also Published As

Publication number Publication date
JPH01272154A (ja) 1989-10-31

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